E03001 - SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM) Lang-Korean 注意: 本文書は，編集上の修正を伴い再承認された。

注意:　本文書は，編集上の修正を伴い再承認された。

The test method applies to point of use (POU) and large scale purifiers

since non-planarity can lead to problems in subsequent processing steps

This Guide will provide a generic optical measurement methodology and linear dimensional parameters such as translation

some of electronic paper displays are equipped with front light

E03001 - SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM) Lang-Korean 注意: 本文書は，編集上の修正を伴い再承認された。This Standard establishes a Specific Equipment Model (SEM) for Inspection and Review Equipment (ISEM). The model consists of equipment characteristics and behavior that are to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The intent of this Standard is to facilitate the integration of ISEM equipment into an automated (semiconductor fabrication) factory. This Document accomplishes this by defining an